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In the manufacturing process of micro-drills, inspection is an essential part. Facing the growing need of special head micro drill, a visual inspection method is proposed. Shape dimension including blade diameter and core thickness is measured by line and circle fitting, then standard profile of the blade is fitted by an improved line fitting method and NURBS spline curve fitting method, which can be used in the judgement of the defects and the calculation of their size. In the end , a visible software is designed to test the algorithm and the result shows the algorithm, which is valid, reliable and accurate, can meet the need of the inspection of special head micro drill.The measurement repeatability error of dimensional parameters of various head-type micro drills is within 0.02% and defect parameter measurement repeatability error of various head-type micro drills is within 2%.