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As the core part of thin film thermocouple structure, the size design of thin film thermocouple electrode plays an important role in the realization of thermocouple function and performance. The size effect analysis of thermocouple electrode thin film is taken as the research object in this paper. The relevant mathematical model based on the mechanism of thermoelectricity and heat conduction is established. The effect of thin film thermocouple electrode size on the static and dynamic characteristics of thermocouples is anlysed. The thin film thermocouple electrode with different size are designed and manufactured. The experimental about the physical performance of size effect are carried out. The experimental results show that the thickness of thermocouple electrode thin film has a positive correlation with the dynamic response time, and the length, width and area have no obvious influence on the characteristics of the thermocouple, which provide a sufficient theoretical and engineering basis for the design of the electrode size of the thin film thermocouple.