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In the view of current situation that the performance of radio frequency integrated circuit (RFIC) continues to enhance and the application of RFIC is increasingly widespread. At the same time, in order to meet the testing requirements of RFIC employed in 5G application, the design of radio frequency test module of domestic automatic test equipment (ATE) system for integrated circuits is developed on the basis of international advanced automatic testing technology of integrated chip. By investigating the market demand of testing requirements of common RFIC and RFIC employed in 5G applications, the performance of radio frequency (RF) transceiver module is optimized with technique of miniaturization design. Furthermore, the modularity design of frequency converter which solves the problem of increasing frequency of RFIC is utilized to increase the application range of the system. There are four RF channels, and each channel has four RF ports, so at most 16 device-under-test (DUT) can be measured by the system, and testing efficiency of system are improved markedly. In summary, the system can transmit and analyze 50M-12GHz vector signal along with functions of noise figure measurement, S-parameter measurement and generation of two-tone signal.