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In view of the widely used temperature measurement, the paper designed a smart temperature sensor based on multi measuring point. The smart temperature sensor connected multi conventional temperature sensing units, signal conditioning circuits, the microprocessor with digital bus interface together, and it was integrated on a silicon substrate using a 3D monolithic structure of smart sensor, the three-dimensional integrated multi-layer structure was realized. The smart temperature sensor used the signal magnitude, trends, fault diagnosis and sensor information fusion method of redundancy measuring point, realizes sensor fault diagnosis and improves the measurement accuracy.